Three-dimensional nanostructures can possess quantum properties such as quantum effects, size effects, and surface effects that are imparted by nanomaterials and structures, and can also realize electrophonon transport and coupling, spin polarization, exciton behavior, and waves through three-dimensional geometric structures. The coordinated modulation of physical properties, such as front-end control, obtains functions that planar devices do not have. At present, the controllable processing methods of three-dimensional nanostructures are obviously insufficient, which hinders the development of three-dimensional nanodevices and restricts the formation of high-end nano-industrialization technologies. In order to obtain excellent three-dimensional nanostructures and devices, a variety of three-dimensional nano-processing technologies have been researched at home and abroad, including self-assembling growth, nano-printing, femtosecond laser processing, and energy-harvesting particle beam processing technologies. However, how to realize three-dimensional space The controllable processing and functionalization of three-dimensional nanostructures are still challenging topics.
In recent years, Liu Zhe, an engineer of the Institute of Physics of the Chinese Academy of Sciences/Beijing National Laboratory of Coagulation State Microsurgery (Chip), the deputy chief engineer Li Wuxi, the chief engineer Li Junjie, and the doctoral student Cui Ajuan and the researcher Gu Changzhi have systematically conducted Focused ion beam technology on the three-dimensional nanostructure and device controllable processing technology research, and made a series of progress.
They invented a new method of strain-induced three-dimensional nanostructure processing based on focused ion beams, namely the use of ion beam irradiation injecting effects and the temperature effect generated by the energy conversion and transmission of incident particles, resulting in the localization of nanomaterials. Surface reconstruction, defects, crystal structure changes, and the three-dimensional space-induced deformation of nanomaterials is achieved, thereby constructing three-dimensional functional nanostructures and devices. This focused ion beam based strain processing method can combine high precision, multi-dimension, cross-scale, design, and controllability.
They first used this technique to construct a variety of three-dimensional nanostructures such as self-supporting nano-gap, nano-contacts, and nano-multiple limbs of one-dimensional metal W, confirming that these structures can have superconducting critical transition temperatures as high as 5.2K and better Mechanical properties and thermal stability [Appl. Phys. Lett. 100, 143106 (2012); Appl. Phys. Lett. 102, 213112 (2013)]. After that, they used this technology to achieve the non-uniform growth of the components and microstructures of the self-supporting Pt nanowires along the radial direction, and through the exploration and quantification of thermal induced strain laws, they mastered the controllable means of deformation and obtained The self-supporting nano-dots on the top of the silicon cone and the micro-cage structure that fixes the ZnO double-layered nano-tub show the application potential of the method in three-dimensional nanoelectronics, optics, magnetism, and biomolecules [Scientific Reports. 3 , 2429 (2013)].
Recently, they collaborated with Li Jiafang, a research fellow of the Physics Laboratory of Physics, Li Zhiyuan, a researcher, Professor Shen Tiehan of the University of Salford, UK, and Li Hongqiang, a professor at Tongji University, to extend the processing method of focused ion beam strain-induced three-dimensional nanostructures to two. Dimensional thin film material system, developed a folding strain processing method based on ion beam irradiation, which can fold the structures in the plane several times in an orderly manner to realize the large modulability of the nano structure units in space, size, cycle and geometric shape. Area controllable processing. The method can be used to construct three-dimensional structures on metals, dielectrics and composite nano-films. Using this technology, they designed and built a series of three-dimensional plasmonic micro-nanostructures based on gold nano-films with hole-vertical open resonant ring (MH-VSRR). These structures have obvious anomalous Fareno resonance phenomenon in the infrared-near infrared region, and can be used for high-sensitivity optical refractive index sensing. The sensitivity in the near-infrared region is as high as 2040 nm/RIU, which is the highest reported in the same structure of this band at present. value. Shows the application prospects of this kind of three-dimensional nano-fabrication technology in making highly sensitive nano-optical devices and bio-sensing [Light: Science & Applications 4, e308 (2015)].
The above work has been funded by related projects of the Chinese Academy of Sciences, the National Natural Science Foundation of China and the Ministry of Science and Technology.
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